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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
MVD (mvd)
Savannah ALD (savannah)
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report
PDF File:
ALD Precursor Delivery & Debugging: A Case Study in Polymer Development- Final Report
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Materials
PI (Polyimide)
Thursday, August 10, 2023
