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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
ALD Dielectric Electrical Characterization- Final Report
ALD Dielectric Electrical Characterization- Final Report
PDF File:
ALD Dielectric Electrical Characterization- Final Report
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Materials
Alumina (Al
2
O
3
)
Hafnia (HfO
2
)
Wednesday, April 14, 2021
