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Function and Method(s):
Patterning
Equipment Used:
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
Related Documentation
Project
Etching Block Copolymer Directed Self-Assembly Holes
Block Copolymer Directed Self-Assembly Standard Operating Procedure
Block Copolymer Directed Self-Assembly Standard Operating Procedure
PDF File:
Block Copolymer Directed Self-Assembly Standard Operating Procedure
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Thursday, August 10, 2023
