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Block copolymer etch in lampoly

PROM Request Title: 
Block copolymer etch in lampoly
PROM Request Summary: 
Non-standard material etch in clean tool in SNF
PROM Date: 
04/07/2021
PROM Decision: 
Request approved.
Link to PROM Request and supporting documentation: 
Block copolymer etch in lampoly
Equipment List: 
Lam Research TCP 9400 Poly Etcher (lampoly)
Materials: 
Polymer (Various polymers)