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Block copolymer etch in lampoly
PROM Request Title:
Block copolymer etch in lampoly
PROM Request Summary:
Non-standard material etch in clean tool in SNF
PROM Date:
04/07/2021
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Block copolymer etch in lampoly
Equipment List:
Lam Research TCP 9400 Poly Etcher (lampoly)
Materials:
Polymer (Various polymers)
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