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STSetch2 Profile Characterization- Undercut Investigation for Silicon Trench Etching in STSetch2
Project Type:
E241
Date:
December 2010
Areas of Interest:
STSetch2 Profile Characterization
Function and Method:
Dry Etching
Researchers and (Mentors):
Lele Wang, Dong Liang, Yu-Shuen Wang, (Jim McVittie)
Report(s):
STSetch2 Profile Characterization - Undercut Investigation for Silicon Trench Etching in STSetch2- Final Report
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