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Sputtering Deposition of Metal and Dielectric Films
Project Type:
E241
Date:
June 2011
Areas of Interest:
Low temp deposition of Ti, SiO2 and W
Function and Method:
Sputtering
Researchers and (Mentors):
Vijay Parameshwaran, (Ed Myers)
Presentation(s):
Sputtering deposition of metals and dielectrics- Final Presentation
Report(s):
Sputtering Deposition of Metal and Dielectric Films- Final Report
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