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A Low Temperature, Low Stress SiGe Process
Project Type:
E241
Date:
March 2011
Areas of Interest:
Low Temp, Low Stress SiGe Process
Function and Method:
Low Pressure (LP) CVD
Researchers and (Mentors):
Scott Lee and Chen Chen
List of Important Equipment:
ThermcoPoly1 (thermcopoly1)
ThermcoPoly2 (thermcopoly2)
Report(s):
A Low Temperature, Low Stress SiGe Process- Final Report
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