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A Low Temperature, Low Stress SiGe Process

Project Type: 
E241
Date: 
March 2011
Areas of Interest: 
Low Temp, Low Stress SiGe Process
Function and Method: 
Low Pressure (LP) CVD
Researchers and (Mentors): 
Scott Lee and Chen Chen
List of Important Equipment: 
ThermcoPoly1 (thermcopoly1)
ThermcoPoly2 (thermcopoly2)
Report(s): 
A Low Temperature, Low Stress SiGe Process- Final Report