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Deep Trench Spray Coating
Project Type:
E241
Date:
December 2010
Areas of Interest:
Spray coating of resist in 350um deep Si trench
Report(s):
Final Report Deep Trench Spray Coating- Final Report
Function and Method:
Resist coat
Researchers and (Mentors):
Karthik Vijayraghavan
List of Important Equipment:
EVG 101 Spray Coater (evgspraycoat)
Presentation(s):
Deep Trench Spray Coating Final Presentation
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