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Deep Trench Spray Coating

Project Type: 
E241
Date: 
December 2010
Areas of Interest: 
Spray coating of resist in 350um deep Si trench
Function and Method: 
Resist coat
Researchers and (Mentors): 
Karthik Vijayraghavan
List of Important Equipment: 
EVG 101 Spray Coater (evgspraycoat)
Presentation(s): 
Deep Trench Spray Coating Final Presentation
Report(s): 
Final Report Deep Trench Spray Coating- Final Report