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Characterization of EV Spraycoater; Conformal Coating in deep Trenches

Project Type: 
E241
Date: 
March 2011
Areas of Interest: 
Spray coating of resist in 30-50um deep Si trenchs
Function and Method: 
Researchers and (Mentors): 
Ehsan Sadeghipour, (Mahnaz Mansourpour), (Jason Parker)
List of Important Equipment: