Skip to content Skip to navigation

Characterization of EV Spraycoater; Conformal Coating in deep Trenches

Project Type: 
E241
Date: 
March 2011
Areas of Interest: 
Spray coating of resist in 30-50um deep Si trenchs
Report(s): 
Characterization of EV Spraycoater: Conformal Coating in Deep Trenches- Final Report
Processing Technique (former Function and Method): 
Resist coat
Researchers and (Mentors): 
Ehsan Sadeghipour, (Mahnaz Mansourpour), (Jason Parker)
List of Important Equipment: 
EVG 101 Spray Coater (evgspraycoat)
Presentation(s): 
Characterization of EV Spraycoater: Conformal Coating in Deep Trenches- Final Presentation