We have started collecting "Nano Nuggets"- useful bits of information about different processing methods that should be extremely helpful either in getting started or avoiding pitfalls along the way. Some of them are parts of more detailed project reports, so if you want more info about a nugget, the report should be linked. Check them out!
This phenomenon is known as ‘green gap’. This document provides a brief background into the technical challenges that inspired the Green Gap E241 project.
Troubleshooting tips for roughened surfaces after etch (also called grassing or line edge roughness).
Block copolymer Directed Self Assembly (DSA) is a technique used to create high resolution structures without advanced lithography techniques.
When using grayscale lithography on the Heidelberg, there are a few quirks that may slow down your progress. This document provides some warnings and helpful tricks to overcome the common roadblocks.
“Tips” or “tricks” on use of the Lambda Flipchip Bonder and the integration with lithography and metallization steps that are used in preparation for bonding.
A summary of the main findings in the literature regarding resist reflow.
Operating manual for glovebox-r and the transfer station located inside the glovebox.
Various maintenance and troubleshooting tips for the Voltera V-One tool. As this tool is new to SNF, and relatively new to the market, one should expect some teething issues.