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Nb etch in PT-Metal
PROM Request Title:
Nb etch in PT-Metal
PROM Request Summary:
Request to use PT Metal to etch Nb.
PROM Date:
10/21/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Nb etch in PT-Metal
Equipment List:
Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL)
