ALD Dielectric Electrical Characterization
Project Type:
E241
Date:
June 2014
Areas of Interest:
High-k dielectrics, Al2O3, HfO, MOSCAP
Processing Technique (former Function and Method):
Researchers and (Mentors):
Max Shulaker, (Michelle Rincon), (J Provine)
List of Important Equipment:
Presentation(s):
