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Function and Method(s):
Atomic Layer Deposition (ALD)
Equipment Used:
Savannah ALD (savannah)
F19- SOP for Low-Temperature ALD of Alumina and Film Quality Characterization
F19- SOP for Low-Temperature ALD of Alumina and Film Quality Characterization
PDF File:
click here to directly access the pdf
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Thursday, August 10, 2023
