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Perovskite etching of BTO, STO, and KTO

PROM Request Title: 
Perovskite etching of BTO, STO, and KTO
PROM Request Summary: 
Etch of BTO, STO, and KTO perovskites in MRC.
PROM Date: 
12/14/2021
PROM Decision: 
Request approved for MRC only.