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Modified Process on STS

PROM Request Title: 
Modified Process on STS
PROM Request Summary: 
Use STS to generate Ni catalyst balls from thin film.
PROM Date: 
09/23/2015
PROM Decision: 
Request approved. No equipment modifications will be allowed.
Link to PROM Request and supporting documentation: 
Modified Process on STS
Equipment List: 
STS Plasma Enhanced CVD (sts)