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CLK-820

PROM Request Title: 
CLK-820
PROM Request Summary: 
Request to use J.T. Baker CLK-820 photoresist stripper for Cu on an ongoing basis.
PROM Date: 
05/16/2014
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
CLK-820
Equipment List: 
Wet Bench Flexcorr 1 (wbflexcorr-1)