ALD of Lithium containing thin films
PROM Request Title:
ALD of Lithium containing thin films
PROM Request Summary:
Change Fiji3 contamination categories to allow processing of Lithium-containing thin films.
PROM Date:
10/31/2016
PROM Decision:
Approved. VPD-ICPMS data analysis demonstrated some remaining Li contamination risk to future Fiji3 users. Lab community notified.
Link to PROM Request and supporting documentation:
Equipment List:
