Stinson (ExFab L104/106)

Considerations for coordinated occupancy:

- On the Heidelberg side, users on Heidelberg, Flipchip bonder and Nanospec would need to co-ordinate their occupancy.

- On the Nanoscribe side, users would need to co-ordinate occupancy within these clusters of tools. a)  Nanoscribe, Wbexfab_solv, Headway3 and Wbexfab_dev  b) Wbexfab_dev, AFM, YES oven, c)Yes Oven, AFM and Alpha Step

Rules:

- There are 3 entrances to Stinson. One from the main hallway and 2 from the cleanroom side. Visually count the number of users before entering the Stinson room. Total room occupancy is 3.

- Reserve tools, to reflect your planned presence in the lab.

- Check reservations on Badger.

- Coordinate occupancy if required.

- If someone has a long run on Nanoscribe, they may not be physically present during most of the run. If you are using Nanoscribe, please reserve Wbexfab_solv for substrate preparation, unloading, developing and objective cleaning processes

- If you are using Headway3, please reserve Wbexfab_solv as well.