InOx Thin Film Development on Savannah ALD system
PROM Request Title:
InOx Thin Film Development on Savannah ALD system
PROM Request Summary:
Develop InOx recipe on Savannah (had previously only been on Fiji2)
PROM Date:
04/25/2018
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
