Patterning

We are using the grouping of Patterning to describe ways of creating shapes of materials on a sample that don't easily fall into one of our other categories.

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Documentation

Grayscale Lithography and Resist Reflow for Parylene Patterning- Final Presentation
Grayscale Lithography and Resist Reflow for Parylene Patterning- Final Report
Mix-and-Match: E-beam and Optical Lithography for Optical Gratings and Waveguides- Final Report
Patterning SPR220 on Reflective Materials with Nanoscribe

Processing details for using SPR-220 positive resist on a reflective metal surface to make 3D structures on the Nanoscribe.
Released Lithium Niobate Structures on Silicon using the PT-DSE

We propose to develop a robust process for undercutting Si from structures using SF6 in the PT-DSE. Previous works have released LN nanomechanical resonators using XeF2 in the Xactix, but extreme sensitivity to chamber conditions and drastic differences in the silicon and silicon oxide etch rates led to unreliable etch rates and a low yield on final devices.
Resist Adhesion During Wet Etching

Tips for wet etching of glass substrates with resist adhesion problems.
Self-Assembly Schemes for the Fabrication of Inverse Opals

The nanoscribe can be used to create template structures for particle self assembly, and details about inverse opal BCC and FCC structures are described.
Silicon Nitride Nanoscale Stencils for Non-destructive Metal Grating Patterning

A process flow is presented to create periodic metallic gratings on the order of 150 nm using a stencil lithography technique.
SOP for Bioprinting on Nanostructures

A guide to using a new PLPP gel protocol developed by Alveole.
SOP for Making Vertical Nanostructures with Various Shapes

A two stage etching procedure can be used to fabricate various vertical nanostructures for bio-relatedexperiments.
SOP for particle self assembly and RDF characterization

Highly monodisperse 4 um PMMA spherical particles were assembled in PDMS wells on either a silicon substrate or a glass coverslip. In order to quantify the order of one assembly compared to another, a radial distribution function (RDF) is used.
SOP- Gold-PDMS adhesion enhancement

Adhesion between metals and polymers are rarely explored. For each type of polymer and metal combination, a customized adhesion method needs to be established- here is a case study for PDMS and Gold adhesion.