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Function and Method(s):
Thermal ALD
Equipment Used:
Savannah ALD (savannah)
W20- Characterization of Alumina and Hafnia grown by low-temperature ALD Final Report
W20- Characterization of Alumina and Hafnia grown by low-temperature ALD Final Report
PDF File:
W20- Characterization of Alumina and Hafnia grown by low-temperature ALD Final Report
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Thursday, August 10, 2023
