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Equipment Used:
Savannah ALD (savannah)
Project Proposal: Characterizing ALD HfO2 roughness based on different deposition conditions
Project Proposal: Characterizing ALD HfO2 roughness based on different deposition conditions
PDF File:
Project Proposal: Characterizing ALD HfO2 roughness based on different deposition conditions
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Thursday, August 10, 2023
