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Silicon Germanium

Chemical Formula:

SiGe

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
Epi2 epi2	Clean	SNF Cleanroom Paul G Allen L107	50 Å - 3 μm	Ge Si Si SiGe
ThermcoPoly1 thermcopoly1	Clean	SNF Cleanroom Paul G Allen L107	100 Å - 3 μm	Ge Si Si SiGe
ThermcoPoly2 thermcopoly2	Flexible	SNF Cleanroom Paul G Allen L107	100 Å - 3 μm	Ge Si Si SiGe

Etch Equipment

Etch Equipment
Equipment name & Badger ID	Cleanliness	Location	Primary Materials Etched	Other Materials Etched
AMAT P5000 Etcher p5000etch	Clean Clean (Ge) Semiclean	SNF Cleanroom Paul G Allen L107	Si based materials Si SiGe SiN SiO₂ SiON Poly Silicon	C C C dimethylpolysiloxane poly(p-xylylene) SiC Ti Various C-based W WSi₂ PI Resist Ti Tungsten
Lam Research TCP 9400 Poly Etcher lampoly	Clean Semiclean	SNF Cleanroom Paul G Allen L107	Si Poly Silicon	Ge SiGe
STS Deep RIE Etcher stsetch	Clean Semiclean	SNF Cleanroom Paul G Allen L107	Si	Ge SiGe
Xactix Xenon Difluoride Etcher xactix	All	SNF Cleanroom Paul G Allen L107	Ge Si SiGe

Projects