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SNF: Metallization

mr_equipment

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Equipment name & Badger ID Technique Cleanliness Material Thickness Range Materials Lab Supplied Materials User Supplied Minimum Resolution Objective Separation Process Temperature Range Substrate Size Substrate Type Maximum Load
Innotec Evaporator
Innotec
Flexible
,
,
22 four inch wafers
Intlvac Evaporation
Intlvac_evap
Clean, Semiclean
0 - 1 μm
,
,
12 4 inch wafers, 2 6 inch wafers