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Stanford Nanofabrication Facility
SNF is open under
New Normal Rules
. ANY shadowing must be coordinated with SNF staff first.
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Nickel Oxide
Chemical Formula:
Ni
x
O
y
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Fiji 2
fiji2
Flexible
SNF Cleanroom Paul G Allen L107
1 Å
-
50 nm
Metal oxides
Al
2
O
3
Ga
2
O
3
HfN
HfO
2
In
2
O
3
In
x
Sn
y
O
z
MoO
3
Ni
x
O
y
Pt
Ru
SiN
SiO
2
SnO
2
SrO
Ta
2
O
5
TiN
TiO
2
Various Dielectrics
ZrO
2
AJA Evaporator
aja-evap
Flexible
SNF Exfab Paul G Allen 155A Venice
0
-
300 nm
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
Hf
Ni
Ni
x
O
y
Pd
Pt
SiO
2
Ti
TiO
2
Etch Equipment
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
