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85% Phosphoric Acid

Chemical Formula:

H₃PO₄

Full Chemical Name (for In-Use Hazardous Chemicals card):

Phosphoric Acid

Phosphoric acid is an etchant that has traditionally been used for nitride etches.

Equipment name & Badger ID	Training Required & Charges	Cleanliness	Location	Chemicals	Notes
Wet Bench Clean_res- hotphos wbclean_res-hotphos	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	Clean	SNF Cleanroom Paul G Allen L107	H₃PO₄	Resist should have been removed
Wet Bench Flexcorr 1 wbflexcorr-1	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	Flexible	SNF Cleanroom Paul G Allen L107	Acids Bases Gold Etchant H₃PO₄ 20:1 BOE 50:1 HF 6:1 BOE 9:1 Piranha Al-Etch Chrome Etch KOH SC1 SC2	Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.