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nSiL: 159 Capitola

New Badger Area created for occupancy limits.

mr_equipment

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Equipment name & Badger ID Technique Cleanliness Material Thickness Range Minimum Resolution Objective Separation Process Temperature Range Gases Substrate Size Substrate Type Maximum Load
DISCO Backgrinder
disco-backgrind
Flexible
DISCO Wafer Saw
DISCO wafersaw
Flexible
,
,
,
,
,
,
,
,
1x4", 1x6" or 1x8" wafer, or pieces
GnP POLI-400L
cmp
Flexible
Thermolyne
thermolyne
Flexible
25 °C - 1000 °C
25