Equipment name & Badger ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
TylanBPSG tylanbpsg |
TylanBPSG Deposition Furnace Training | Clean, Semiclean | SNF Cleanroom Paul G Allen L107 | |
Tylanfga Forming Gas Anneal Furnace tylanfga |
Forming Gas Anneal Furnace Training | Semiclean | SNF Cleanroom Paul G Allen L107 |
For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information. |
Equipment name & Badger ID | Technique | Cleaning Required | Cleanliness | Material Thickness Range | Materials Lab Supplied | Minimum Resolution | Objective Separation | Process Temperature Range | Gases | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|---|---|
TylanBPSG tylanbpsg |
Pre-Diffusion Clean, Standard Metal Clean | Clean, Semiclean |
100 Å -
3 μm
|
|
|
300 °C - 450 °C
|
, , |
26 | ||||
Tylanfga Forming Gas Anneal Furnace tylanfga |
Standard Metal Clean | Semiclean |
100 Å -
100 Å
|
|
|
250 °C - 800 °C
|
50 |