Equipment name & Badger ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
Tylanfga Forming Gas Anneal Furnace tylanfga |
Forming Gas Anneal Furnace Training | Semiclean | SNF Cleanroom Paul G Allen L107 |
For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information. |
Equipment name & Badger ID | Technique | Cleaning Required | Cleanliness | Material Thickness Range | Process Temperature Range | Gases | Substrate Size | Maximum Load |
---|---|---|---|---|---|---|---|---|
Tylanfga Forming Gas Anneal Furnace tylanfga |
Standard Metal Clean | Semiclean |
100.00 Å -
100.00 Å
|
250 °C - 800 °C
|
50 |