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Standard Metal Clean

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Equipment name & Badger ID Training Required & Charges Cleanliness Location Notes
TylanBPSG
tylanbpsg 		TylanBPSG Deposition Furnace Training Clean, Semiclean SNF Cleanroom Paul G Allen L107
Tylanfga Forming Gas Anneal Furnace
tylanfga 		Forming Gas Anneal Furnace Training Semiclean SNF Cleanroom Paul G Allen L107

For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information.
Equipment name & Badger ID Technique Cleaning Required Cleanliness Material Thickness Range Materials Lab Supplied Minimum Resolution Objective Separation Process Temperature Range Gases Substrate Size Substrate Type Maximum Load
TylanBPSG
tylanbpsg
Pre-Diffusion Clean, Standard Metal Clean Clean, Semiclean
100 Å - 3 μm
300 °C - 450 °C
(Si)
,
(SiGe)
,
(SiO2)
 26
Tylanfga Forming Gas Anneal Furnace
tylanfga
Standard Metal Clean Semiclean
100 Å - 100 Å
250 °C - 800 °C
50