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Standard Metal Clean

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Equipment name & Badger ID Training Required & Charges Cleanliness Location Notes
Tylanfga Forming Gas Anneal Furnace
Forming Gas Anneal Furnace Training Semiclean SNF Cleanroom Paul G Allen L107

For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information.

Equipment name & Badger ID Technique Cleaning Required Cleanliness Material Thickness Range Process Temperature Range Gases Substrate Size Maximum Load
Tylanfga Forming Gas Anneal Furnace
Standard Metal Clean Semiclean
100.00 Å - 100.00 Å
250 °C - 800 °C