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P-GaN/AlGAN/GaN E-mode HEMT

Project Type: 
E241
Date: 
March 2019
Areas of Interest: 
MOCVD, HEMT
Function and Method: 
Researchers and (Mentors): 
Seungbin Jeong, Anand Lalwani, (Xiaoqing Xu), (Caitlin Chapin), (Don Gardner), (Dong Lee)
List of Important Equipment: 
Nano Nugget(s): 
photo of aix-ccs susceptor

This document describes things you need to check before operating the Stanford MOCVD aix-ccs tool for safety and correct operation.