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ZnO film development using DMZ and Ozone on MVD

PROM Request Title: 
ZnO film development using DMZ and Ozone on MVD
PROM Request Summary: 
Request to use new DMZ precursor on the MVD with Ozone for ZnO film development.
PROM Date: 
04/01/2019
PROM Decision: 
Request approved. Please see process staff for details.
Equipment List: 
MVD (mvd)
Savannah ALD (savannah)