Phosphine

Chemical Formula:

PH₃

Gases Equipment Tabs

Etch Equipment Table

No equipment matches all of the filter criteria you have set above.

Anneal/Oxidation Equipment Table

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
AMAT Centurion Epitaxial System epi2	Clean	SNF Cleanroom Paul G Allen L107	50.00 Å - 3.00 μm	Ge Si SiGe
Thermco LTO Deposition Furnace thermcoLTO	Flexible	SNF Cleanroom Paul G Allen L107	100.00 Å - 3.00 μm	SiO₂