Drying samples in the SNF is often done by using an N2 gun or by using an SRD (Spin Rinse Dryer) near the wet benches. In cases where your structure may be damaged by standard drying techniques, the CPD (Critical Point Dryer) may be useful.
Critical Point Drying (CPD) tool is used for carbon dioxide (CO2) drying after release of bulk or surface micromachined devices.
CO2 drying after release of micromachined devices
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