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Stanford Nanofabrication Facility
SNF is open under
New Normal Rules
. ANY shadowing must be coordinated with SNF staff first.
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Aluminum Gallium Arsenide
Chemical Formula:
AlGaAs
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Aix200
aix200
Flexible
SNF MOCVD Paul G Allen 213XA
0
-
5 μm
AlAs
AlGaAs
GaAs
GaP
GaPN
III-V materials
InAs
InGaAs
InGaAsN
Etch Equipment
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.