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Stanford Nanofabrication Facility
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Palladium
Chemical Formula:
Pd
Equipment Tabs
Annealing & Oxidation Equipment
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
AJA Evaporator
aja-evap
Flexible
SNF Exfab Paul G Allen 155A Venice
0
-
300 nm
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
Hf
Ni
Ni
x
O
y
Pd
Pt
SiO
2
Ti
TiO
2
AJA2 Evaporator
aja2-evap
Semiclean
SNF Cleanroom Paul G Allen L107
0
-
300 nm
Ag
Al
Co
Cr
Ge
Hf
Mo
Nb
Pd
Pt
Si
Ta
Ti
V
W
Zr
Innotec Evaporator
Innotec
Flexible
SNF Cleanroom Paul G Allen L107
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
In
Mo
Ni
Pd
Si
Ta
Ti
W
Intlvac Evaporation
Intlvac_evap
Clean
Semiclean
SNF Cleanroom Paul G Allen L107
0
-
1 μm
Al
Co
Cr
Ge
Hf
Mo
Nb
Ni
Pd
Si
Ta
Ti
V
W
Zr
Lesker Sputter
lesker-sputter
Flexible
SNF Exfab Paul G Allen 155A Venice
Ag
Al
Al
2
O
3
AlSi
Au
Co
Cr
Cu
Fe
In
x
Sn
y
O
z
Nb
Ni
Pd
Si
SiO
2
Ta
Ti
TiN
W
Lesker2 Sputter
lesker2-sputter
Semiclean
SNF Cleanroom Paul G Allen L107
1 μm
Ag
Al
Al
2
O
3
AlSi
Cr
Ge
In
x
Sn
y
O
z
Mo
Pd
Ru
Sc
Si
SiO
2
Sn
Ta
Ti
TiN
W
Etching Equipment
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.