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Stanford Nanofabrication Facility
SNF is open under
New Normal Rules
. ANY shadowing must be coordinated with SNF staff first.
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4% Forming gas
Chemical Formula:
4% H
2
in N
2
Gases Equipment Tabs
Etch Equipment Table
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
Anneal/Oxidation Equipment Table
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Aw610_l
aw610_l
Clean
SNF Cleanroom Paul G Allen L107
Aw610_r
aw610_r
Flexible
SNF Cleanroom Paul G Allen L107
