SPR220-3 resist
| Equipment name & Badger ID | Training Required & Charges | Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Headway 3 Manual Resist Spinner headway3 |
Resist Coat (manual) Headway 3 Training 1.00 hours |
SNF Exfab Paul G Allen 104 Stinson |
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Headway Manual Resist Spinner headway2 |
Resist Coat (manual) Headway Manual Training 1.00 hours |
SNF Cleanroom Paul G Allen L107 |
|
Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists |
|
|
Laurell Manual Resist Spinner laurell-R |
Laurell Manual Resist Spinner Training 1.00 hours |
SNF Cleanroom Paul G Allen L107 |
SU-8, LOL, Ebeam resists allowed. No Acetone allowed. |
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|
SVG Resist Coat Track 1 svgcoat |
SVG Resist Coat Tracks 1 and 2 Training 1.25 hours |
SNF Cleanroom Paul G Allen L107 |
|
Automatic Resist spinning and bake |
