Equipment name & Badger ID | Technique | Cleanliness | Material Thickness Range | Materials Lab Supplied | Materials User Supplied | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Resist | Developer | Process Temperature Range | Chemicals | Gases | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
AJA Evaporator aja-evap |
Flexible |
0.00 -
300.00 nm
|
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4"x3 or 6"x1 wafers or pieces | |||||||||||||
AJA2 Evaporator aja2-evap |
Semiclean |
0.00 -
300.00 nm
|
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4"x3 or 6"x1 wafers or pieces | |||||||||||||
Aligner Contact Karl Suss MA-6 karlsuss |
All |
|
365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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DISCO Wafer Saw DISCO wafersaw |
Flexible |
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1x4", 1x6" or 1x8" wafer, or pieces | ||||||||||||||
EVG 101 Spray Coater evgspraycoat |
All |
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1 | ||||||||||||||
EVG Contact Aligner evalign |
All |
|
350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
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one piece or wafer | ||||||||||
Ex Fab Develop Wet Bench wbexfab_dev |
Flexible | ||||||||||||||||
Ex Fab Solvent Wet Bench wbexfab_solv |
Flexible | ||||||||||||||||
Fiji 1 ALD fiji1 |
Semiclean |
1.00 Å -
50.00 nm
|
24 °C - 350 °C
|
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Fiji 2 ALD fiji2 |
Flexible |
1.00 Å -
50.00 nm
|
24 °C - 350 °C
|
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Fiji 3 ALD fiji3 |
Flexible |
1.00 Å -
50.00 nm
|
24 °C - 350 °C
|
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Flexus 2320 Stress Tester stresstest |
All |
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1 | ||||||||||||||
Headway Manual Resist Spinner headway2 |
All |
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one piece or wafer | ||||||||||||||
Heidelberg MLA 150 heidelberg |
All |
|
405 nm |
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1 | ||||||||||||
Heidelberg MLA 150 - 2 heidelberg2 |
All |
|
375 nm |
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1 | ||||||||||||
HMDS Vapor Prime Oven, YES yes |
All |
150 ºC
|
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Innotec Evaporator Innotec |
Flexible |
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22 four inch wafers | ||||||||||||||
Intlvac Evaporator Intlvac_evap |
Clean, Semiclean |
0.00 -
0.50 μm
|
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12 4 inch wafers, 2 6 inch wafers | |||||||||||||
Karl Suss MA-6 Contact Aligner karlsuss2 |
All |
|
365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Keyence Digital Microscope VHX-6000 keyence |
All |
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