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Poly Si

Preferred Short Name: 
Poly Silicon
Chemical Formula: 
Si

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger IDsort descending Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
Epi2
epi2
SNF Cleanroom Paul G Allen L107
50 Å - 3 μm
ThermcoPoly1
thermcopoly1
SNF Cleanroom Paul G Allen L107
100 Å - 3 μm
ThermcoPoly2
thermcopoly2
SNF Cleanroom Paul G Allen L107
100 Å - 3 μm
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