Xactix Xenon Difluoride Etcher xactix |
Xactix Xenon Difluoride Etcher Training |
All |
SNF Cleanroom Paul G Allen L107 |
Isotropic Si etching; can be used for backside Si removal on small pieces
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Woollam woollam |
Woollam Training |
All |
SNF Cleanroom Paul G Allen L107 |
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Wet Bench Solvent Lithography lithosolv |
Lithography Solvent Bench Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual solvent cleaning of substrates or masks. Teflon coated metal tweezers cleaning.
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Wet Bench Resist Strip wbresstrip-1 |
Wet Bench Resist Strip |
Clean (Ge), Semiclean, Flexible |
SNF Cleanroom Paul G Allen L107 |
Wet Resist Removal: SRS-100 or PRS1000
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Wet Bench Miscellaneous wbmiscres |
Wet Bench Miscellaneous Photoresist Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual development of resist in beakers and Headway (manual resist spinner). SNF approved developers (acid or base). No solvents!
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Wet Bench Flexible Solvents 2 wbflexsolv-2 |
Wet Bench Flexible Solvents 1 and 2 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual solvent cleaning, hot plate
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Wet Bench Flexible Solvents 1 wbflexsolv-1 |
Wet Bench Flexible Solvents 1 and 2 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual solvent cleaning, two ultrasonic baths.
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Wet Bench Flexible Solvents wbflexsolv |
Wet Bench Flexible Solvents 1 and 2 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual solvent cleaning of substrates or resist removal.
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Wet Bench Flexcorr 4 wbflexcorr-4 |
Wet Bench Flexcorr 1and2 and 3and4 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual wet etching of non-standard materials using acids or bases. Hot plate, HF bath, and controlled temperature bath available. GaAs not allowed.
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Wet Bench Flexcorr 3 wbflexcorr-3 |
Wet Bench Flexcorr 1and2 and 3and4 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual wet etching of non-standard materials using acids or bases. Hot Plate available. GaAs not allowed.
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Wet Bench Flexcorr 2 wbflexcorr-2 |
Wet Bench Flexcorr 1and2 and 3and4 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual wet etching of non-standard materials. Hot pots available. GaAs allowed in personal labware only
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Wet Bench Flexcorr 1 wbflexcorr-1 |
Wet Bench Flexcorr 1and2 and 3and4 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Tylanfga Forming Gas Anneal Furnace tylanfga |
Forming Gas Anneal Furnace Training |
Semiclean |
SNF Cleanroom Paul G Allen L107 |
For standard metals deposited in Lesker2, Intlvac Sputter or Intlvac Evaporation only. N2 and Ar annealing available. Please contact staff for more information.
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Tylan9 Forming Gas Anneal Furnace tylan9 |
Forming Gas Anneal Furnace Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Any material that won't vaporize is okay. N2 and Ar annealing available.
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Thermco3 Oxidation Furnace thermco 3 |
Thermco 3 Oxidation Furnaces Training |
Clean |
SNF Cleanroom Paul G Allen L107 |
Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.
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Tencor P2 Profilometer p2 |
Tencor P2 Profilometer Training |
Clean, Semiclean |
SNF Cleanroom Paul G Allen L107 |
Step height measurement range 500 Å to 80 µm
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SPTS uetch vapor etch uetch |
SPTS uetch vapor etch Training |
All |
SNF Cleanroom Paul G Allen L107 |
Pieces need a carrier wafer; Isotropic Etching
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Sinton Lifetime Tester sinton-lifetime-tester |
Sinton Lifetime Tester Training |
Flexible |
SNF Exfab Paul G Allen 151 Ocean |
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Sensofar S-neox s-neox |
Sensofar S-neox Training |
All |
SNF Cleanroom Paul G Allen L107 |
non contact 3D optical profiling
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SEM -Zeiss Merlin sem-merlin |
SEM-Merlin Training |
All |
SNF Exfab Paul G Allen 104 Stinson |
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