Use of Santovac5 for thermal contact in Plasma Etch (gold systems)
PROM Request Title:
Use of Santovac5 for thermal contact in Plasma Etch (gold systems)
PROM Request Summary:
Experiments performed to identify feasibility of Santovac5 for thermal contact in gold plasma etchers.
PROM Date:
09/18/2013
PROM Decision:
Recommendations for use included in PROM form.
Link to PROM Request and supporting documentation:
Equipment List:
