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Use of Parylene D in parcoater

PROM Request Title: 
Use of Parylene D in parcoater
PROM Request Summary: 
Use of a new Parylene in Mavericks
PROM Date: 
03/11/2020
PROM Decision: 
Request approved. Please see process staff for details.
Equipment List: 
PDS 2010 LABCOTER™ 2 Parylene Deposition System (parcoater)