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Use of AZ 125nxt photoresist

PROM Request Title: 
Use of AZ 125nxt photoresist
PROM Request Summary: 
Request to use AZ 125nxt resist in headway, karl suss, and SVG dev.
PROM Date: 
03/25/2015
PROM Decision: 
Request approved.
Link to PROM Request and supporting documentation: 
Use of AZ 125nxt photoresist
Equipment List: 
Headway Manual Resist Spinner (headway2)
Karl Suss MA-6 Contact Aligner (karlsuss)
SVG Develop Track 1 (svgdev)