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UHV Al sputtering for processing in SNF

PROM Request Title: 
UHV Al sputtering for processing in SNF
PROM Request Summary: 
Documenting processing for clean Al deposition in post-Gryphon SNF tool era.
PROM Date: 
08/19/2016
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
UHV Al sputtering for processing in SNF
Equipment List: 
ThermcoNitride (thermconitride1)
Tylanfga (tylanfga)