Ta3N5 ALD in Fiji3
PROM Request Title:
Ta3N5 ALD in Fiji3
PROM Request Summary:
Request for non-standard processing in Fiji3. Request approved.
PROM Date:
05/20/2017
PROM Decision:
Request approved. Chamber isolation with HfO2 required after processing.
Link to PROM Request and supporting documentation:
Equipment List:
