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Metal Assisted Chemical Etch

PROM Request Title: 
Metal Assisted Chemical Etch
PROM Request Summary: 
Etch Ti-Au on Silicon using HF, H2O2 and EthOH on wbflexcorr and wb-solv.
PROM Date: 
08/01/2017
PROM Decision: 
Request approved.
Link to PROM Request and supporting documentation: 
Metal Assisted Chemical Etch
Equipment List: 
Wet Bench Flexcorr 1 (wbflexcorr-1)