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Metal Assisted Chemical Etch
PROM Request Title:
Metal Assisted Chemical Etch
PROM Request Summary:
Etch Ti-Au on Silicon using HF, H2O2 and EthOH on wbflexcorr and wb-solv.
PROM Date:
08/01/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Metal Assisted Chemical Etch
Equipment List:
Wet Bench Flexcorr 1 (wbflexcorr-1)
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