Metal Assisted Chemical Etch
PROM Request Title:
Metal Assisted Chemical Etch
PROM Request Summary:
Etch Ti-Au on Silicon using HF, H2O2 and EthOH on wbflexcorr and wb-solv.
PROM Date:
08/01/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
