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Lampoly HBr/Cl2/O2 etching of silicon oxide on lithium niobate

PROM Request Title: 
Lampoly HBr/Cl2/O2 etching of silicon oxide on lithium niobate
PROM Request Summary: 
Request to introduce LiN into a clean category etcher.
PROM Date: 
08/18/2018
PROM Decision: 
Request approved. VPD Analysis complete.