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Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates

PROM Request Title: 
Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates
PROM Request Summary: 
Request for processing of metal containing wafers on semiclean lampoly tool.
PROM Date: 
04/28/2019
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates
Equipment List: 
Lam Research TCP 9400 Poly Etcher (lampoly)