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Hydrogen Anneal of Si Wafer after PT-DSE

PROM Request Title: 
Hydrogen Anneal of Si Wafer after PT-DSE
PROM Request Summary: 
Request to hydrogen anneal contaminated wafers in epi furnace.
PROM Date: 
05/24/2017
PROM Decision: 
Request approved to try H2 anneal in graphene furnace. Data collection showed graphene furnace is not viable option.
Equipment List: