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Hot wet etch for SiC

PROM Request Title: 
Hot wet etch for SiC
PROM Request Summary: 
Request to use hot HF:HNO3 solution to etch silicon carbide.
PROM Date: 
06/20/2015
PROM Decision: 
Request rejected due to safety concerns.
Link to PROM Request and supporting documentation: 
Hot wet etch for SiC
Equipment List: 
Wet Bench Flexcorr 1 (wbflexcorr-1)