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Hot wet etch for SiC
PROM Request Title:
Hot wet etch for SiC
PROM Request Summary:
Request to use hot HF:HNO3 solution to etch silicon carbide.
PROM Date:
06/20/2015
PROM Decision:
Request rejected due to safety concerns.
Link to PROM Request and supporting documentation:
Hot wet etch for SiC
Equipment List:
Wet Bench Flexcorr 1 (wbflexcorr-1)
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