Etching T12B SOG in Pt-Ox
PROM Request Title:
Etching T12B SOG in Pt-Ox
PROM Request Summary:
Request to etch T12B spin on glass in PT-OX etcher.
PROM Date:
07/25/2014
PROM Decision:
Approved.
Link to PROM Request and supporting documentation:
Equipment List:
